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Article
Thermometry of gas layers in thermal plasma CVD by pulsed-laser Rayleigh scattering
The application of Pulsed-Laser Rayleigh Scattering Thermometry (PLRST) to Chemical Vapor Deposition (CVD) processing of diamond films in a thermal induction plasma is demonstrated. Temperature profiles were m...
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Article
Atomic hydrogen concentration map** in thermal plasma chemical vapour deposition
Two-dimensional maps of atomic hydrogen concentration in reactive gas layers were measured using two-photon laser-induced fluorescence. The measurements were made in conditions of diamond-film chemical vapour ...
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Article
Reverse-Flow Swirl Radio-Frequency Induction Plasmatron
Experimentally observed modes of an rf induction (RFI) discharge in argon with reverse-flow swirl stabilization are described. The data on the simulation of RFI plasmatrons are analyzed; it is demonstrated tha...
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Article
Two-dimensional atomic hydrogen concentration maps in hot-filament diamond-deposition environment
This paper reports the two-dimensional map** of atomic hydrogen concentration with two-photon excited laser induced fluorescence in a multi-wire grid hot-filament chemical vapor deposition reactor. The measu...