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Article
Microstructural Characterization of CdTe Surface Passivation Layers
The microstructure of CdTe (CT) surface passivation layers deposited on HgCdTe (MCT) heterostructures has been evaluated using transmission electron microscopy (TEM). The MCT heterostructures were grown by liq...
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Article
Influence of 4H-SiC semi-insulating substrate purity on SiC metal-semiconductor field-effect transistor performance
The performances of silicon carbide (SiC) metal-semiconductor field-effect transistors (MESFETs) fabricated on conventional V-doped semi-insulating substrates and new V-free semi-insulating substrates have bee...
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Article
Minimization of Di Water Consumption In Wet Clean Rinse Tanks
The use of resistivity-monitored dump-rinse tanks in semiconductor wet processing allows the rinse process to be optimized, substantially reducing DI water consumption while minimizing the deleterious effects ...
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Chapter
In Situ Laser Beam Probes for Semiconductor Processing
In order to provide in situ, real time, non-invasive monitoring of the etching and deposition rates and the passivation levels of semiconductor wafers, during the processing of these materials for chip fabricatio...