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  1. No Access

    Article

    Rocking-Angle Ion-Milling of Cross-Sectional Samples for Transmission Electron Microscopy of Multi-Layer Systems

    The cross-sectional transmission electron microscopy (TEM) specimens of Pt/Ti/SiO2/Si, RuO2/SiO2/Si, W/TiN/SiO2/Si, (Pb,La)TiO3/Pt/MgO, Bi4Ti3O12/Lal-xCaxMnO3/MgO, and GaN/Al2O3 were successfully made by the rock...

    Jeong Soo Lee, Hyun Ha Kim, Young Woo Jeong in MRS Online Proceedings Library (1997)

  2. No Access

    Article

    Microstructural Characterization of Pt/Ti and RuO2 Electrodes on SiO2/Si Annealed in the Oxygen Ambient

    Microstructures and interdiffusions of Pt/Ti/SiO2/Si and RuO2/SiO2/Si during annealing in O2 were investigated using x-ray diffraction, Auger electron spectroscopy, scanning electron microscopy, and transmission ...

    Jeong Soo Lee, Hyun Ja Kwon, Young Woo Jeong, Hyun Ha Kim… in MRS Online Proceedings Library (1996)

  3. No Access

    Article

    Microstructures and electrical resistivities of the RuO2 electrode on SiO2/Si annealed in the oxygen ambient

    The electrical resistivity property of RuO2 thin films grown on the SiO2/Si substrate by reactive dc sputtering was examined in terms of microstructure using x-ray diffraction and cross-sectional transmission ele...

    Jeong Soo Lee, Hyun Ja Kwon, Young Woo Jeong, Hyun Ha Kim… in Journal of Materials Research (1996)