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    Optimization of temperature uniformity of a serpentine thin film heater by a two-dimensional approach

    In this paper, a two-step method is proposed to optimize the layout of the conventional serpentine film heater thus to improve the temperature uniformity. The optimization is made on transverse direction first...

    Yuming Wu, **aosong Du, Yaru Li, Huiling Tai, Yuanjie Su in Microsystem Technologies (2019)