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  1. No Access

    Article

    Optimal Design of Reactors for Metalorganic Vapor Phase Epitaxy of Group III Nitrides

    Metalorganic Vapor Phase Epitaxy (MOVPE) has emerged as the technique of choice for growing thin films and structures of group III-nitrides. The objective of this work is to address the optimal design of verti...

    R. P. Pawlowski, C. Theodoropoulos, T. J. Mountziaris… in MRS Online Proceedings Library (2000)

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    Article

    Robust Reaction-Transport Models of MOVPE Reactors

    A simple gas-phase and surface kinetic model describing the Metalorganic Vapor Phase Epitaxy (MOVPE) of GaAs from trimethyl-gallium (TMG) and arsine has been extracted from reported reaction mechanisms through...

    C. Theodoropoulos, H. K. Moffat, T. J. Mountziaris in MRS Online Proceedings Library (1997)