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Article
Robust Reaction-Transport Models of MOVPE Reactors
A simple gas-phase and surface kinetic model describing the Metalorganic Vapor Phase Epitaxy (MOVPE) of GaAs from trimethyl-gallium (TMG) and arsine has been extracted from reported reaction mechanisms through...
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Article
Optimal Design of Reactors for Metalorganic Vapor Phase Epitaxy of Group III Nitrides
Metalorganic Vapor Phase Epitaxy (MOVPE) has emerged as the technique of choice for growing thin films and structures of group III-nitrides. The objective of this work is to address the optimal design of verti...