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  1. No Access

    Article

    Area Selective Laser Chemical Vapor Deposition of Diamond

    High quality diamond spots were deposited on silicon substrates by a hot filament process combined with laser heating. A mixture of CH4(1.8 vol%) and H2was passed over a tantalum filament having a temperature of ...

    M. Lindstam, M. Boman, K. Larsson, G. Stenberg… in MRS Online Proceedings Library (1995)

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    Article

    Laser Assisted Deposition of Amorphous Hydrogen Containing Carbon at Room Temperature

    Hydrogen-containing amorphous carbon films were produced from CH, I, by photolytical laser assisted chemical vapour deposition at room temperture. An Ar+ laser operated in the ultraviolet spectral region (351 and...

    G. Stenberg, K. Piglmayer, M. Boman, J.-O. Carlsson in MRS Online Proceedings Library (1995)