Page
%P
1 Result(s)
within
Fumio Watanabe
Materials Science
Applied and Technical Physics
Inorganic Chemistry
-
Article
Impact of EBAS annealing on sheet resistance reduction for Al-implanted 4H-SiC(0001)
In this paper, we demonstrate that high temperature and short time EBAS annealing is effective to obtain low sheet resistance without surface roughening in heavily Al-implanted 4H-SiC (0001) samples (Al concen...
