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    Electrostatic comb drive actuators with variable gap: nonlinear dynamics at primary resonance

    This paper provides an extensive study of the nonlinear dynamics of a variable gap electrostatic comb-drive. The resonant response, as well as the force response of the comb-drive were obtained and analyzed ta...

    N. V. Mozhgova, A. V. Lukin, I. A. Popov, D. A. Indeitsev in Meccanica (2022)