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    Chapter

    Effects of Metallic Impurities upon thin Gate Oxide Integrity and Related Bulk Properties in CZ Si

    In this study, we investigated effects of various well-known metallic impurities such as Fe, Cu, and Al (contaminated by a spin coating method with concentration levels ranged from 1 × 1010 to 1 × 1010 atoms/cm2)...

    K.-C. Cho, J.-G. Park, Y.-S. Kwak, D.-J. Lee… in The Physics and Chemistry of SiO2 and the … (1993)