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    Fabrication of three-dimensional hemispherical structures using photolithography

    A photolithography technique using SU-8 and PDMS was developed to fabricate three-dimensional hemispherical structures. This technique utilized a mask-aligner and normal binary coded photomasks to generate hem...

    Chee Tiong Lim, Hong Yee Low, Johnson K. K. Ng… in Microfluidics and Nanofluidics (2009)