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    RF Aerosol Mist Plasma Deposition of Oxide Films

    We report new results on nano-scaled oxide films deposited by an RF aerosol mist plasma technique: including indium tin oxide transparent conductive films; yttria stabilized zirconia, nickel iron oxide/YSZ cer...

    J. A. A. Williams, C. Q. Shen, K. D. Vuong, E. Tenpas… in MRS Online Proceedings Library (1994)