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    Article

    A chemical sensor based on a micromechanical cantilever array for the identification of gases and vapors

    can be detected by its adsorption on a Pt-coated sensor because a change in surface stress causes a static bending of the sensor. The diffusion of various alcohols into polymethylmethacrylate induces resonanc...

    H.P. Lang, R. Berger, F. Battiston, J.-P. Ramseyer, E. Meyer… in Applied Physics A (1998)

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    Chapter and Conference Paper

    Transduction Principles and Integration of Chemical Sensors into a Micromechanical Array Device

    Ultraprecise measurement tools are indispensable components for most scientific engineering enterprises and for manufacturing process controls. For such applications, micromechanical devices are potentially ve...

    R. Berger, H. P. Lang, C. Andreoli… in Sensor Technology in the Netherlands: Stat… (1998)