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    Chapter and Conference Paper

    Transduction Principles and Integration of Chemical Sensors into a Micromechanical Array Device

    Ultraprecise measurement tools are indispensable components for most scientific engineering enterprises and for manufacturing process controls. For such applications, micromechanical devices are potentially ve...

    R. Berger, H. P. Lang, C. Andreoli… in Sensor Technology in the Netherlands: Stat… (1998)