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Article
Diamond Diode Structures Based on Homoepitaxial Films
(m–i–p)-Structures with high-resistance epitaxial i-layers are fabricated on heavily doped p+-type substrates with platinum contacts. The structures are studied using several methods: optical and electron microsc...
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Chapter and Conference Paper
Determination of Gas Temperature in a CVD Reactor from Optical Emmission Spectra with the Help of Artificial Neural Networks and Group Method of Data Handling (GMDH)
Optical emission spectroscopy is widely used for monitoring of low-temperature plasmas in science and technology [1]. However, determination of temperature from optical emission spectra is an inverse problem t...
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Article
Evolution of perturbations in a high-pressure non-self-sustaining discharge
An experimental and numerical investigation is conducted of the evolution of perturbations, which are excited in a non-self-sustaining discharge, which is controlled by an electron beam at pressures close to a...