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Waveguide formation of KTiOPO4 by multienergy MeV He+ implantation
X-cut potassium titanyl phosphate (KTiOPO4 or KTP) was implanted by multienergy MeV He+ implantation with a total dose of 2 × 1016 ions/cm2 at liquid nitrogen temperature. The energy and dose used are as follows:...