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  1. No Access

    Chapter

    Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN)

    Nanoscale science and technology demands novel approaches and new knowledge for further development. Nanofabrication has been widely employed in modern science and engineering. Probe-based nanolithography is a...

    Luohan Peng, Huiliang Zhang, Philip Hemmer… in Scanning Probe Microscopy in Nanoscience a… (2013)

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    Article

    Effect of ozone treatment on the optical and electrical properties of HfSiO thin films

    The effect of room temperature ozone oxidation treatment on thin HfSiO film grown by atomic layer deposition (ALD) has been investigated. The optical and electrical properties with different post-ozone oxidati...

    Yang Geng, Wen Yang, Shang-Bin Zhu, Yuan Zhang, Qing-Qing Sun… in Applied Physics A (2014)

  3. No Access

    Article

    Growth and interfacial properties of atomic layer deposited Al0.7Ti0.3O y high-k dielectric on Ge substrate

    Growth and interfacial properties of atomic layer deposited Al0.7Ti0.3O y on Ge have been investigated as a potential high-k gate dielectric for future Ge-based metal oxide semi...

    Hong-Liang Lu, Zhang-Yi **e, Yang Geng, Yuan Zhang, Qing-Qing Sun… in Applied Physics A (2014)