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Article
Analysis of the dynamic behaviour of a torsional micro-mirror
In this paper, the results of the dynamic pull-in voltage characteristics of a micro-mirror using electrostatic actuation are analyzed. Based on torsional dynamic theory, appropriate equations are developed th...
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Article
Surface micromachined high-performance RF MEMS inductors
High-performance three-dimensional (3-D) microinductors with air-core and polyimide-core were fabricated by using simple MEMS technology. Both inductors have electroplated copper coils to minimize resistance t...
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Article
Modeling, optimization and performance of high-Q MEMS solenoid inductors
Modeling, optimization and performance of on-chip solenoid inductors is presented. MATLAB is used to get the π-equivalent circuit model parameters. The effects of the geometrical parameters on the inductance and ...
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Article
Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor
Future microwave networks require miniature high-performance tunable elements such as switches, inductors, and capacitors. In this paper, high performance variable capacitor was fabricated by simple microelect...
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Article
Electrostatically driven tunable radio frequency inductor
An electrostatically driven tunable radio frequency (RF) inductor with large inductance tuning range consisting of electroplated soft magnetic permalloy (Ni80Fe20 alloy) plate was proposed in this paper. The fabr...
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Article
Morphological and histological analysis on the in vivo degradation of poly (propylene fumarate)/(calcium sulfate/β-tricalcium phosphate)
Poly (propylene fumarate)/(Calcium sulfate/β-tricalcium phosphate) (PPF/(CaSO4/β-TCP)) is a kind of biodegradable composite designed for bone tissue engineering. The in vitro degradation behavior of this composit...