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    Comparative Study of Near Stochiometric a-SiC:H and a-SiC Films: Effect of the Bonded Hydrogen

    Amorphous silicon carbon films having near stochiometric composition had been deposited by (i) reactive magnetron sputtering of silicon target in argon-methane gas mixture (a-SiC:H films) and (ii) ion-plasma d...

    A.V. Vasin, A.V. Rusavsky, V.I. Kushnirenko… in Innovative Superhard Materials and Sustain… (2005)