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    Chapter and Conference Paper

    Fabrication and Simulation of Nanostructures on Silicon by Laser Assisted Direct Imprint Technique

    In this paper a newly proposed nano-patterning technology, namely laser assisted direct imprinting (LADI), is adopted with fabrication and numerical simulation for nano-scaled structures. We focused on the tar...

    Fei-Bin Hsiao, Yung-Chun Lee, Chuan-Pu Liu in Nanomechanics of Materials and Structures (2006)