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    A Low Cost Angular Rate Sensor for Automotive Applications in Surface Micromachining Technology

    A second generation angular rate sensor suitable for high volume production is presented. The sensor consists of an electrostatically driven oscillating disk, which reacts — due to the conservation law for ang...

    R. Schellin, A. Thomae, M. Lang, W. Bauer… in Advanced Microsystems for Automotive Appli… (1999)