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    Determination of Main Parameters of Air Floating Support System for Liquid Crystal Glass Substrate and Its Influence on Micro-Vibration of Glass Substrate

    The physical model of air floating support is established, and calculation formulas of air supply pressure, air film thickness and throttle hole diameter are derived from the formula. The maximum amplitude of ...

    Xuejian Wang, Yunjie Ma, Zhi Xu, Bin Huang… in Proceedings of 2023 the 6th International … (2024)