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    Structural and Mechanical Properties of TiON Nanocomposite Films Deposited on Silicon by Pulsed Bias Arc Ion Plating

    Nanocomposite TiON thin films were deposited on p-(100) silicon substrate using a pulsed bias arc ion plating technique with the substrate bias ranging from 0V to -700V. XRD and TEM were used to characterize t...

    Min Zhang, Yuli Pan, **aogang Hu, Ye Huang… in Proceedings of the 8th Pacific Rim Interna… (2016)