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    Chapter and Conference Paper

    Equipment and Process Simulation of Compound Semiconductor MOCVD in the Production Scale Multiwafer Planetary Reactor

    The article addresses the use of computational modelling during the equipment design and process development of the Planetary Reactor®, an industrial production scale multiwafer reactor for the MOCVD (Metalorgani...

    M. Dauelsberg, M. Deufel, M. Reinhold… in Simulation of Semiconductor Processes and … (2001)