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Chapter and Conference Paper
An Electronic Nose Based on A Micromechanical Cantilever Array
We present a novel chemical sensor based on a micromechanical array of silicon cantilevers sensitized for the detection of analytes using cantilever coatings such as metals, self-assembled monolayers, or polym...
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Chapter and Conference Paper
Transduction Principles and Integration of Chemical Sensors into a Micromechanical Array Device
Ultraprecise measurement tools are indispensable components for most scientific engineering enterprises and for manufacturing process controls. For such applications, micromechanical devices are potentially ve...