4 Result(s)
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Chapter
Scanning Probe Alloying Nanolithography
The probe-based nanolithography method is attracting increasing attentions due to its unique and simple process characteristics. This chapter, first, provides a brief review of nanolithography in order to see ...
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Chapter
Tribology in Chemical–Mechanical Planarization
Chemical–mechanical planarization (CMP) is one of the most important process steps in making integrated circuits. Tribology plays significant roles in material removal, polishing, and planarization. This chapt...
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Chapter
Development of Low-Voltage Energy-Saving Aluminum Reduction Technology
In this study, the representative low-voltage energy-saving techniques for aluminum reduction in recent years in China is reviewed, and two low-voltage energy-saving techniques are described, which include the...
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Chapter and Conference Paper
Minimising Cost for Travel Bus Operator
The tourist travel bus sector is one of the main contributors to the Singapore economy. However, the cost optimization is a challenging factor when it comes to operating a travel bus. This project, BusPathFind...
