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    Algorithms and Models for Simulation of MOCVD of III-V Layers in the Planetary Reactor

    Advances in development of mathematical models and numerial techniques for modelling of MOCVD in the Planetary Reactor™ are presented. Importance of coupled flow and mass transport calculations, accurate model...

    T. Bergunde, M. Dauelsberg, Yu. Egorov… in Simulation of Semiconductor Devices and Pr… (1995)