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    Highly Sensitive Strain Sensor for the Qualification of Epoxy Compounds Designed for the Encapsulation of Microsystems

    The sensitivity of semiconductor strain gauges has been greatly increased by cutting a u-shaped groove into the back side of the sensor chips. With two different modes of deformation, these sensors can discrim...

    H. Weidner, H. Borner, J. Villain in Micro System Technologies 90 (1990)