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Chapter and Conference Paper
Monolithic Active Pixel Sensors in a 130 nm Triple Well CMOS Technology
The attention of several groups in the particle physics community has been drawn to monolithic active pixel sensors (MAPS) in CMOS technology as promising candidates for charge particle tracking at the future ...
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Chapter and Conference Paper
An Electronic Nose Based on A Micromechanical Cantilever Array
We present a novel chemical sensor based on a micromechanical array of silicon cantilevers sensitized for the detection of analytes using cantilever coatings such as metals, self-assembled monolayers, or polym...
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Chapter and Conference Paper
Transduction Principles and Integration of Chemical Sensors into a Micromechanical Array Device
Ultraprecise measurement tools are indispensable components for most scientific engineering enterprises and for manufacturing process controls. For such applications, micromechanical devices are potentially ve...