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Article
System integration for on-machine measurement using a capacitive LVDT-like contact sensor
In this study, an air-bearing capacitive linear variable differential transformer (LVDT)-like contact sensor with a rounded diamond tip was mounted to a desktop machine tool to construct an on-machine (OM) mea...
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Article
Recent Development of Piezoelectric Fast Tool Servo (FTS) for Precision Machining
With an increasing demand of photoelectric components, the micro/ultraprecision machining technology has become more and more important. However, for some particular applications such as micro lens array for l...