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    Effect of Excimer Laser Annealing on Optical Properties of GaN Films Deposited by R.F. Magnetron Sputtering

    GaN thin films on sapphire were grown by RF magnetron sputtering with ZnO buffer layer. The tremendous mismatch between the lattices of GaN and sapphire can be partly overcome by the use of thin buffer layer o...

    Man Young Sung, Woong-Je Sung, Yong-Il Lee, Chun-Il Park… in MRS Online Proceedings Library (2001)