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    Open Access

    Micromachined Infrared Thermopile Detector Based on a Suspended Film Structure

    The micro-electromechanical system (MEMS) infrared thermopile is the core working device of modern information detection systems such as spectrometers, gas sensors, and remote temperature sensors. We presented...

    Cheng Lei, Yihao Guan, Ting Liang, Xuezhan Wu, Yuehang Bai… in Photonic Sensors (2023)

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