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Article
Open AccessLES and ILES Simulations of Free-Jets
A systematic numerical study was performed to investigate the influence of subgrid-scale (SGS) treatments on the simulation of turbulent free-jets. Large eddy simulations (LES) of such flows were performed to ...
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Article
An experimental study on the compatibility of acetone with aluminum flat-plate heat pipes
This study investigates the compatibility of aluminum flat-plate heat pipes (FPHPs) used for filling acetone as a working fluid after long-term operation of and the non-condensable gas (NCG) exhausting process...
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Article
Advanced planning and scheduling for TFT-LCD color filter fab with multiple lines
Intense global competition and declining profit have caused most thin film transistor liquid crystal display manufacturers to increase their competitiveness by improving productivity and reducing cycle times. ...
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Article
Combined product and tool disturbance estimator for the mix-product process and its application to the removal rate estimation in CMP process
In this paper, we proposed a control strategy: Combined Product and Tool Disturbance Estimator (CPTDE) which combines threaded double EWMA with the drift compensation scheme, to adaptively estimate the disturb...
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Article
Advanced process control of metal sputter deposition using a time series analysis
Using a time series model, we constructed a disturbance model for the aluminum sputter deposition process, and derived an autoregressive integrated moving average and recursive least-squares (ARIMA-RLS) contro...