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    Two-step hybrid process of movable part inside glass substrate using ultrafast laser

    We demonstrate a two-step hybrid process for fabricating movable parts inside glass substrate using the selective laser-induced etching (SLE) process that is consisted of laser-direct writing and wet chemical ...

    Jeongtae Kim, Sung-Il Kim, Yeun-Ho Joung, Jiyeon Choi… in Micro and Nano Systems Letters (2021)

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