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Article
Position feedback control for electrostatically controlled linear actuator
In this paper, we introduce a position feedback control for an electrostatically controlled linear actuator. The electrostatically controlled linear actuator, which is fabricated using microelectromechanical s...
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Article
Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline
A compact beamline dedicated to hard x-ray deep lithography for fabrication of high aspect ratio MEMS microparts has been developed. The exposure stage was only 3 meters away from the synchrotron radiation (S...