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    SIMOX Material Development for Sub-0.25μm CMOS Technology

    Advantages of SOI materials for CMOS technology arc discussed. The lending SOI materials for CMOS applications appear to be SIMOX and BSOI presently. Progress made in two types of SIMOX, namely, standard and t...

    D. K. Sadana, H. J. Hovel, J. L. Freeouf, S. F. Chu in MRS Online Proceedings Library (1993)