Page
%P
![Loading...](https://link.springer.com/static/c4a417b97a76cc2980e3c25e2271af3129e08bbe/images/pdf-preview/spacer.gif)
-
Article
Impact of a Ti Adhesion Layer on Pt/PZT/Pt Capacitors
A five-factor, full-factorial experiment on process sensitivity of non-volatile polarization, Pnv, for Pt/PZT/Pt capacitors shows the most dramatic factor is the use, or not, of a Ti adhesion layer for the bottom...
-
Article
Impact of Backend Processing on Integrated Ferroelectric Capacitor Characteristics
Integration of a ferroelectric capacitor module in a standard CMOS process subjects the ferroelectric to various ambients during backend processing, some of which can render the ferroelectric essentially non-o...