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Article
Microstructures and interdiffusions of Pt/Ti electrodes with respect to annealing in the oxygen ambient
The microstructural variation and the interdiffusion of Pt (80 nm)/Ti (70 nm)/SiO2/Si during annealing in O2 were investigated using Auger electron spectroscopy, x-ray diffraction, transmission electron microscop...
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Article
Epitaxial Growth and Physical Properties of La1-xCaxMnO3-δ Thin Films on MgO(001) Substrates
Perovskite La1-xCaxMnO3-δ (LCMO) thin films with a wide range of x, i.e., 0.0 ≤ x ≤ 0.6, were deposited on MgO(001) substrates using a pulsed laser deposition (PLD) technique. Epitaxial La0.7Ca0.3MnO3-δ/MgO thin ...
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Article
Microstructures and electrical resistivities of the RuO2 electrode on SiO2/Si annealed in the oxygen ambient
The electrical resistivity property of RuO2 thin films grown on the SiO2/Si substrate by reactive dc sputtering was examined in terms of microstructure using x-ray diffraction and cross-sectional transmission ele...
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Article
Microstructural Characterization of Pt/Ti and RuO2 Electrodes on SiO2/Si Annealed in the Oxygen Ambient
Microstructures and interdiffusions of Pt/Ti/SiO2/Si and RuO2/SiO2/Si during annealing in O2 were investigated using x-ray diffraction, Auger electron spectroscopy, scanning electron microscopy, and transmission ...
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Article
Rocking-Angle Ion-Milling of Cross-Sectional Samples for Transmission Electron Microscopy of Multi-Layer Systems
The cross-sectional transmission electron microscopy (TEM) specimens of Pt/Ti/SiO2/Si, RuO2/SiO2/Si, W/TiN/SiO2/Si, (Pb,La)TiO3/Pt/MgO, Bi4Ti3O12/Lal-xCaxMnO3/MgO, and GaN/Al2O3 were successfully made by the rock...
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Article
The effect of active-layer thickness on the characteristic of nanocrystalline silicon thin film transistor
We fabricated nc-Si TFTs in order to investigate the effect of the active-layer thickness on the characteristic of the nc-Si TFT. Bottom gate nc-Si TFTs were fabricated at 350°C using ICP-CVD. The thicknesses ...
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Article
A sub-micron metallic electrothermal gripper
We report the design, fabrication, and characterization of a multiple bent beam, sub-micron metallic electrothermal gripper. A bottom electroplating mold for electrodes was patterned using electron beam lithog...
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Article
Microstructural Evolution of Nickel Induced Crystallization of Amorphous Silicon
The Ni silicide-mediated phase transformation of amorphous to crystalline silicon (c-Si) was studied using transmission electron microscopy. Amorphous silicon (a-Si) films coated with very thin Ni layer (∼10-1Å) ...
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Article
Investigation of Amorphous IGZO TFT Employing Ti/Cu Source/Drain and SiNx Passivation
We successfully fabricated a-IGZO TFTs employing a Ti/Cu source/drain (S/D) and SiNx passivation in order to reduce the line-resistance, as compared to most oxide TFTs that use Mo (or TCO) and SiO2 for their S/D ...
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Article
Spontaneous bilayer phase separations of spin-coated polymer blend thin films: A neutron reflectivity study
This study investigates the spontaneous formation of phase-separated bilayer structures of polymer blend thin films upon spin coating. Neutron reflectivity is used to measure the bilayer structure of deuterate...
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Article
Erratum to: Charge transfer in graphene/polymer interfaces for CO2 detection
The order of the authors in the original version of this article was unfortunately incorrect on the first page and the first page of the ESM.
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Article
Charge transfer in graphene/polymer interfaces for CO2 detection
Understanding charge transfer processes between graphene and functional materials is crucial from the perspectives of fundamental sciences and potential applications, including electronic devices, photonic dev...