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    Measurement of residual stress in a multi-layer semiconductor heterostructure by micro-Raman spectroscopy

    Si-based multilayer structures are widely used in current microelectronics. During their preparation, some inhomogeneous residual stress is induced, resulting in competition between interface mismatching and s...

    Wei Qiu, Cui-Li Cheng, Ren-Rong Liang, Chun-Wang Zhao… in Acta Mechanica Sinica (2016)