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    Fabrication and characterization of an attonewton-sensitivity Si cantilever with an Nb micro-ring

    We have fabricated ultrasensitive silicon cantilevers integrated with a superconducting Nb microring as a key part of a flux quantum-based force measurement system and have characterized both their mechanical ...

    Yun Won Kim, Heon Hwa Choi, Jae-Hyuk Choi… in Journal of the Korean Physical Society (2012)