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    Facet Formation of Lineshaped Silicon Mesas Grown with Micro Shadow Masks

    As reported previously, perfect facets can be achieved at the side walls of submicron silicon mesa structures grown by molecular beam epitaxy (MBE) with micro shadow masks [1]. An essentially self organizing, ...

    H. Gossner, G. Fehlauer, W. Kiunke, I. Eisele, M. Stolz… in MRS Online Proceedings Library (1994)