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Article
Low Temperature Formation of C54 TiSi2 Bypassing the C49 Phase: Effect of Si Crystallinity, Metallic Impurities and Applications TO 0.10 μm CMOS
The mechanism and evolution from the early stages of the Ti/Si reaction by rapid thermal processing (RTP) at 650°C in the presence of Mo do** was studied and compared to the case without Mo do**; for amorp...
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Article
Optimization of Ti and Co Self-Aligned Silicide RTP for 0.10 μm Cmos
As CMOS technologies are scaled to 0.10 μm and beyond, self-aligned silicide (salicide) processes find difficult challenges. As junction depths and linewidths are scaled, achieving both low sheet resistance an...
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Article
Modeling the micromechanical aspects of composites
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Article
In Situ Study of the Temperature Dependence of Irradiation-Induced Amorphization in A-Sic
Ion-beam-induced amorphization in single crystal α-SiC has been studied as a function of temperature. Specimens have been irradiated with 1.5 MeV Xe+ ions over the temperature range from 20 to 475 K using the HVE...
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Article
Formation of a Metastable Crystalline Phase During Ion Irradiation of Spinel
We have examined the radiation resistance of magnesio-aluminate spinel by irradiating single crystals of MgAl2O4 with 400 keV Xe++ ions at 100 K. At low irradiation doses, the material transformed into a metas...
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Chapter and Conference Paper
Micromechanical Modeling of Effective Electro-Thermo-Elastic Properties of two-Phase Piezoelectric Composites
A periodic microstructural model is developed to estimate the coupled electro-thermo-elastic response of piezoelectric composites. The model includes vital microstructural parameters, such as the constituent p...
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Article
Microstructure of YBCO Irradiated with 200 KeV Protons and 1 MeV Fluorine Ions
Transmission electron microscopy (TEM) has been used to study the effects of 200 keV proton and 1 MeV fluorine ion irradiation on the microstructure of YBa2Cu3O7-δ (YBCO). Proton irradiation at fluences on the or...
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Article
Nondestructive Characterization of Woven Fabric Ceramic Composites
Woven fabric ceramic composites fabricated by the chemical vapor infiltration method are susceptible to high void content and inhomogeneity. The condition of such materials may be characterized nondestructivel...
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Article
Effect of Ion-beam Radiation on the Anisotropy of Resistivity in YBa2Cu3O7−δ Thin Films
Different behaviors of the normal-state resistivity have been observed in (110)-, (113)- and a-oriented YBa2Cu3O7−δ thin films under 200 keV H+ irradiation. It suggests that the c-axis electrical conduction is ve...
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Article
Damage Accumulation in MgAl2O4 Crystals by Xe Ion Irradiations
We have studied the damage kinetics in single crystal MgAl2O4 (spinel) with (100) orientation under 370 keV Xe ion irradiations at temperatures of −100 and 400 C. In-situ Rutherford Backscattering Spectrometry (R...
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Article
Ion Beam Analysis of O, N, and B Compositions in Materials Using Non-Rutherford Scattering of Protons
Elastic scattering of protons with energies from 1.5 MeV to 2 McV was used to determine the concentration of oxygen in Y-Ba-Cu-0 compound, nitrogen in GaN films, and boron in B-Si glass and other materials. Pr...