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Atomic Layer Deposition

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Encyclopedia of Nanotechnology

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Abstract

ALD; Atomic layer chemical vapor deposition; Atomic layer CVD (AL-CVD); Atomic layer epitaxy (ALE); Molecular layer deposition (MLD)

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References

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Authors and Affiliations

  1. Picosun USA, LLC, 719 Griswold Street, Detroit, MI, 4822, USA

    Dr. Charles L. Dezelah IV

Authors
  1. Dr. Charles L. Dezelah IV
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Correspondence to Charles L. Dezelah IV .

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Editors and Affiliations

  1. Ohio Eminent Scholar and The Howard D. Winbigler Professor, Director, Nanoprobe Laboratory for Bio- & Nanotechnology and Biomimetics (NLB2), Ohio State University, 201 W. 19th Avenue, Columbus, Ohio, 43210-1142, USA

    Bharat Bhushan

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© 2012 Springer Science+Business Media B.V.

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Dezelah, C.L. (2012). Atomic Layer Deposition. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-90-481-9751-4_372

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