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Nanometric Cutting of Crystal Surfaces Modified by Ion Implantation

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Handbook of Manufacturing Engineering and Technology

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Abstract

Single-crystal materials are widely used in optics and electronics field and are essential in condensed matter physics and materials science researches. However, the hard and brittle nature of the materials prevents it from manufacturing intricate features and optical quality surfaces. Nanometric cutting assisted with ion implantation surface modification method reduces the fracture and tool wear during machining by improving the surface mechanical properties. The mechanism, techniques, and applications of this method are specifically explained in the chapter.

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Authors and Affiliations

  1. The State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing Technology, Tian** University, 92 Wei** Road, Tian**, 300072, China

    Yunhui Chen & Prof. Fengzhou Fang

Authors
  1. Yunhui Chen
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  2. Prof. Fengzhou Fang
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Corresponding author

Correspondence to Fengzhou Fang .

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Editors and Affiliations

  1. National University of Singapore, Singapore, Singapore

    Andrew Nee

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© 2013 Springer-Verlag London

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Chen, Y., Fang, F. (2013). Nanometric Cutting of Crystal Surfaces Modified by Ion Implantation. In: Nee, A. (eds) Handbook of Manufacturing Engineering and Technology. Springer, London. https://doi.org/10.1007/978-1-4471-4976-7_70-3

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  • DOI: https://doi.org/10.1007/978-1-4471-4976-7_70-3

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  • Publisher Name: Springer, London

  • Online ISBN: 978-1-4471-4976-7

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