Abstract
Optical waveguides made of SU-8 polymer are increasingly employed to fabricate passive integrated optic devices, such as gratings, optical filters, and microoptical sensors based on Mach–Zehnder Interferometer, optofluidic, and micro-opto-electro-mechanical systems (MOEMS).
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Samanta, S., Banerji, P., Ganguly, P. (2020). Experimental Studies on SU-8 Wire Waveguides. In: Photonic Waveguide Components on Silicon Substrate . SpringerBriefs in Applied Sciences and Technology(). Springer, Singapore. https://doi.org/10.1007/978-981-15-1311-4_3
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DOI: https://doi.org/10.1007/978-981-15-1311-4_3
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