Abstract
In this paper a bio-sensing module by integrating a micro-array probes device and a semiconductor amplifier respectively on two flexible substrates is proposed, which utilizes semiconductor processes. The amplifier is formed of bottom-gate thin film transistors (TFT). As such, the signal obtained by the bio-sensing probes can be amplified nearby to improve the signal-to-noise ratio and impedance matching. This module is formed on the flexible substrate such that the bio-probe device can be disposed to conform to the profile of a living body’s portion to improve the electrical contact property.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
Similar content being viewed by others
References
Lin L, and Pisano, A (1999) Silicon-processed microneedles, J. of Microelectro-Mechanical Systems, 18(1):78–84.
Nomura, K, Ohta, H, Ueda, K et al. (2003) Thin-film transistor fabricated in single-crystalline transparent oxide semiconductor, Science, 300(5623):1269–1272.
Wu Y, Qiu, Y, Zhang S et al. (2008) Microneedle-based drug delivery: studies on delivery parameters and biocompatibility, Biomedical Microdevices.
Chen B, Wei J, Tay E et al. (2008) Silicon microneedle array with biodegradable tips for transdermal drug delivery, Microsystem Technologies, 14/7, pp 1015–1019
Zahn J, Talbot N, Liepmann D et al. (2008) Microfabricated polysilicon micro-needles for minimally invasive biomedical devices, Biomedical Microdevices,pp 295–303
Cormier M., Johnson B, Ameri M, K. et al. (2008) Fabrication and characterization of laser micromachined hollow microneedles, Journal of Controlled Release, pp 503–511
McAllister D, Cros F, Davis S et al. (2004) Three-dimensional hollow microneedle and microtube arrays, J. of Micromechanics and Microengineering, 14:597–602
Meng Z, Wang M, Wong, M (2000) High performance low temperature metal-induced unilaterally crystallized polycrystalline silicon thin film transistors for system-on-panel applications, IEEE Trans. on Electron Devices, 47(2):404–409
Wong M, ** Z, Bhat, G, Wong, P et al. (2000) Characterization of the MIC/MILC interface and its effects on the performance of MILC thin-film transistors, IEEE Tran. on Electron Devices, 47(5): 1061–1067
Rosell J, Colominas, J, Pallas-Areny, R et al. (1988) Skin impedance from 1 Hz to 1 MHz, IEEE Trans. Bio-med Eng., BME-35: 649–651.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2009 International Federation of Medical and Biological Engineering
About this paper
Cite this paper
Lin, J.M., Lin, P.W., Pan, L.C. (2009). Integrating Micro Array Probes with Amplifier on Flexible Substrate. In: Lim, C.T., Goh, J.C.H. (eds) 13th International Conference on Biomedical Engineering. IFMBE Proceedings, vol 23. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-540-92841-6_200
Download citation
DOI: https://doi.org/10.1007/978-3-540-92841-6_200
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-540-92840-9
Online ISBN: 978-3-540-92841-6
eBook Packages: EngineeringEngineering (R0)