SpringerLink
Log in

Prescriptive Analytics for Dynamic Real Time Scheduling of Diffusion Furnaces

  • Chapter
  • First Online:
Supply Chain Management in Manufacturing and Service Systems

Part of the book series: International Series in Operations Research & Management Science ((ISOR,volume 304))

Abstract

This study presents prescriptive analytics to optimally schedule (a) single diffusion furnace, and (b) non-identical parallel diffusion furnaces with machine eligibility restrictions and jobs having different job-arrival times, belonging to different job families, and having non-agreeable release times & due-dates. We also considered real time dynamic events w.r.t. job and resources. Accordingly, we first propose (0-1) mixed integer linear programming (MILP) models to optimize customer perspectives objectives for the scheduling problem considered in this study. Due to the computational difficulty in obtaining optimal value for the customer perspectives objectives, particularly for large-scale data in scheduling diffusion furnace(s), this study presents seven versions of the greedy heuristic algorithm (GHA) considering seven different Apparent Tardiness Cost (ATC) rules. These proposed seven versions of GHA is applied for (i) single diffusion furnace and (ii) non-identical parallel diffusion furnaces with machine eligibility restriction. Further, the empirical evaluation of the proposed seven versions of ATC-GHA is carried out in comparison with the (a) optimal solution for small-scale data and (b) estimated optimal solution for large-scale data. Further, this study conducts statistical evaluation by carrying out descriptive statistics and Kruskal Wallis test. From both the analyses, this study identifies the better performing variants of ATC-GHA.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Log in via an institution

Subscribe and save

Springer+ Basic
EUR 32.99 /Month
  • Get 10 units per month
  • Download Article/Chapter or Ebook
  • 1 Unit = 1 Article or 1 Chapter
  • Cancel anytime
Subscribe now

Buy Now

Chapter
EUR 29.95
Price includes VAT (Germany)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
EUR 139.09
Price includes VAT (Germany)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
EUR 181.89
Price includes VAT (Germany)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free ship** worldwide - see info
Hardcover Book
EUR 181.89
Price includes VAT (Germany)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free ship** worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Similar content being viewed by others

References

  • Balasubramanian, H., Monch, L., Fowler, J., & Pfund, M. (2004, January 01). Genetic algorithm based scheduling of parallel batch machines with incompatible job families to minimize total weighted tardiness. Int J Prod Res, 42(8), 1621–1638.

    Article  Google Scholar 

  • Bar-Noy, A., Guha, S., Katz, Y., Naor, J. S., Schieber, B., & Shachnai, H. (2009, March 01). Throughput maximization of real-time scheduling with batching. ACM Transactions on Algorithms, 5(2), 1–17.

    Article  Google Scholar 

  • Beldar, P., & Costa, A. (2018, January 01). Single machine batch processing problem with release dates to minimize total completion time. International Journal of Industrial Engineering Computations, 9(3), 331–348.

    Article  Google Scholar 

  • Bilyk, A., Mönch, L., & Almeder, C. (2014, October 23). Scheduling jobs with ready times and precedence constraints on parallel batch machines using meta heuristics. Computers & Industrial Engineering, 78, 175–185.

    Article  Google Scholar 

  • Chen, L., Lu, C., Hui, X., & Li, L. (2013, December 01). Learning-based adaptive dispatching method for batch processing machines. In Proceedings of the 2013 Winter Simulation Conference, pp. 3756–3765.

    Google Scholar 

  • Cheng, H. C., Chiang, T. C., & Fu, L. C. (2008, December 01). A memetic algorithm for parallel batch machine scheduling with incompatible job families and dynamic job arrivals. Proceedings of IEEE International Conference on Systems, Man and Cybernetics, 2008, 541–546.

    Google Scholar 

  • Chiang, T.-C., Cheng, H.-C., & Fu, L.-C. (2008, November 01). An efficient heuristic for minimizing maximum lateness on parallel batch machines. Proceedings of the Eighth International Conference on Intelligent Systems Design and Applications, 2, 621–627.

    Google Scholar 

  • Chiang, T.-C., Cheng, H.-C., & Fu, L.-C. (2010, December 01). A memetic algorithm for minimizing total weighted tardiness on parallel batch machines with incompatible job families and dynamic job arrival. Computers & Operations Research, 37(12), 2257–2269.

    Article  Google Scholar 

  • Dirk, R., & Monch, L. (2006, January 01). Multiobjective scheduling of jobs with incompatible families on parallel batch machines. Lecture Notes in Computer Science, 3906, 209–221.

    Article  Google Scholar 

  • Fidelis, M. B., & Arroyo, J. E. C. (2017, October 01). Meta-heuristic algorithms for scheduling on parallel batch machines with unequal job ready times. Proceedings of the IEEE International Conference on Systems, Man and Cybernetics, 2017, 542–547.

    Google Scholar 

  • Guo, C., Jiang, Z., & Hu, H. (2010, December 01). A hybrid ant colony optimization method for scheduling batch processing machine in the semiconductor manufacturing. IEEE International Conference on Industrial Engineering & Engineering Management (IE&EM), 2010, 1698–1701.

    Google Scholar 

  • Hildebrandt T, Heger J, Scholz-Reiter B (2010, July 07). Towards improved dispatching rules for complex shop floor scenarios—A genetic programming approach. In Proceeding of the GECCO’10, July 7–11, Portland, Oregon, USA. Retrieved April 3, 2020, from http://www.genetic-programming.org/hc2010/6-Hildebrandt/Hildebrandt-Paper.pdf

  • Jia, W., Jiang, Z., & Li, Y. (2013a, August 01). Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals. International Journal of Production Research, 51(15), 4570–4584.

    Article  Google Scholar 

  • Jia, W., Jiang, Z., & Li, Y., (2013b, August 01). A job-family-oriented algorithm for re-entrant batch processing machine scheduling. In IEEE International Conference on Automation Science and Engineering, pp. 1022–1027.

    Google Scholar 

  • Jung, C., Pabst, D., Ham, M., Stehli, M., & Rothe, M. (2014, August 01). An effective problem decomposition method for scheduling of diffusion processes based on mixed integer linear programming. IEEE Transactions on Semiconductor Manufacturing, 27(3), 357–363.

    Article  Google Scholar 

  • Kim, Y. D., Joo, B. J., & Choi, S. Y. (2010, January 01). Scheduling wafer lots on diffusion machines in a semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing, 23(2), 246–254.

    Article  Google Scholar 

  • Koo, P.-H., & Moon, D. H. (2013, January 01). A review on control strategies of batch processing machines in semiconductor manufacturing. IFAC Proceedings, 46(9), 1690–1695.

    Google Scholar 

  • Kurz, M.E. (2003, May 22). On the structure of optimal schedules for minimizing total weighted tardiness on parallel, batch-processing machines. In Proceedings of 10 th IE Research Conference, Portland, pp. 1–5.

    Google Scholar 

  • Kurz, M. E., & Mason, S. J. (2008, January 01). Minimizing total weighted tardiness on a batch-processing machine with incompatible job families and job ready times. International Journal of Production Research, 46(1), 131–151.

    Article  Google Scholar 

  • Li, L., &Qiao, F. (2008, August 01). ACO-based scheduling for a single batch processing machine in semiconductor manufacturing. In 4th IEEE International Conference on Automation Science and Engineering, pp. 85–90.

    Google Scholar 

  • Li, L., Qiao, F., & Wu, Q.D. (2009, August 01). ACO-based scheduling of parallel batch processing machines to minimize the total weighted tardiness. In 5 th Annual IEEE Conference on Automation Science and Engineering, pp. 280–285.

    Google Scholar 

  • Li, L., Qiao, F., & Pan, G. (2010, August 17). ACO-based multi-objective scheduling of identical parallel batch processing machines in semiconductor manufacturing. INTECH Open Access Publisher. Retrieved April 3, 2020, from http://www.intechopen.com/books/future-manufacturing-systems/aco-based-multi-objective-scheduling-of-identical-parallel-batch-processing-machines-in-semiconducto

  • Li, Y., Jiang, Z., & Jia, W. (2017, January 02). API-based two-dimensional dispatching decision-making approach for semiconductor wafer fabrication with operation due date-related objectives. International Journal of Production Research, 55(1), 79–95.

    Article  Google Scholar 

  • Malve, S., & Uzsoy, R. (2007, January 01). A genetic algorithm for minimizing maximum lateness on parallel identical batch processing machines with dynamic job arrivals and incompatible job families. Computers and Operations Research, 34(10), 3016–3028.

    Article  Google Scholar 

  • Mansoer, P., & Koo, P.-H. (2015, January 01). A batching strategy for batch processing machine with multiple product types. Journal of Industrial and Intelligent Information, 3(2), 138–142.

    Google Scholar 

  • Mathirajan, M., & Vimalarani, M. (2012, December 13). Scheduling a BPM with incompatible job-families and dynamic job-arrivals. In Proceedings of the 2012 IEEE International Conference on Industrial Engineering and Engineering Management, pp. 622–626. Retrieved April 3, 2020, from https://www.researchgate.net/publication/265597365_Scheduling_a_BPM_with_Incompatible_Job-Families_and_Dynamic_Job-Arrivals

  • Mathirajan, M., & Sivakumar, A. I. (2006, July 01). A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor. The International Journal of Advanced Manufacturing Technology, 29, 990–1001.

    Google Scholar 

  • Mathirajan, M., Sivakumar, A. I., & Kalaivani, P. (November, 2004). An efficient simulated annealing algorithm for scheduling burn-in oven with non-identical job-sizes. The International Journal of Applied Management and Technology, 2(2), 117–138.

    Google Scholar 

  • Mehta, S. V., & Uzsoy, R. (1998, February 01). Minimizing total tardiness on a batch processing machine with incompatible job families. IIE Transactions, 30(2), 165–178.

    Google Scholar 

  • Mönch, L., & Roob, S. (2018, January 01). A matheuristic framework for batch machine scheduling problems with incompatible job families and regular sum objective. Applied Soft Computing, 68, 835–846.

    Article  Google Scholar 

  • Mönch, L., Balasubramanian, H., Fowler, J. W., & Pfund, M. E. (2005, November 01). Heuristic scheduling of jobs on parallel batch machines with incompatible job families and unequal ready times. Computers & Operations Research, 32(11), 2731–2750.

    Article  Google Scholar 

  • Mönch, L., Zimmermann, J., & Otto, P. (2006, April 01). Machine learning techniques for scheduling jobs with incompatible families and unequal ready times on parallel batch machines. Engineering Applications of Artificial Intelligence, 19(3), 235–245.

    Article  Google Scholar 

  • Monch, L., Fowler, J., Dauzère-Pérès, S., Mason, S., & Rose, O. (2011, January 07). A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations. Journal of Scheduling, 14(6), 583–599.

    Article  Google Scholar 

  • Mönch, L., Fowler, J., & Mason, S. J. (2013). Production planning and control for semiconductor wafer fabrication facilities: Modeling, analysis, and systems. New York, NY: Springer.

    Book  Google Scholar 

  • Mönch, L., Chien, C.-F., Dauzère-Pérès, S., Ehm, H., & Fowler, J. W. (2018, July 03). Modelling and analysis of semiconductor supply chains. International Journal of Production Research, 56(13), 4521–4523.

    Article  Google Scholar 

  • Park, H., & Banerjee, A. (2011, December 01). A new dynamic scheduling for batch processing systems using stochastic utility evaluation function. Proceedings of the 2011 Winter Simulation Conference, pp. 2302–2319.

    Google Scholar 

  • Pinedo, M. (2012). Scheduling: Theory, algorithms, and systems. New York: Springer.

    Book  Google Scholar 

  • Pirovano, G., Ciccullo, F., Pero, M., & Rossi, T. (2020, January 01). Scheduling batches with time constraints in wafer fabrication. International Journal of Operational Research, 37(1), 1.

    Article  Google Scholar 

  • Rardin, R. L., & Uzsoy, R. (2001, January 01). Experimental evaluation of Heuristic optimization algorithms: A tutorial. Journal of Heuristics, 7, 261–304.

    Article  Google Scholar 

  • Rocholl, J., Monch, L., & Fowler, J. W. (2018, December 01). Electricity power cost-aware scheduling of jobs on parallel batch processing machines. In Proceedings - Winter Simulation Conference, pp. 3420–3431.

    Google Scholar 

  • Sarin, S. C., &Shikalgar, S. T. (2001, August 25). Reduction of average cycle time at a wafer fabrication facility. GaAs MANTECH, Inc, Grado Department of Industrial and Systems Engineering, Virginia Tech. Retrieved April 3, 2020, from https://pdfs.semanticscholar.org/d3fd/2c0e192b6bcde5d2166ac7d91a2e81ac0917.pdf

  • SGSR: Semiconductor Global Sales Report. (2020). Retrieved August 28, 2020, from https://www.statista.com/statistics/266973/global-semiconductor-sales-since-1988/

  • Sun, C., & Rose, T. (2015, January 01). Supply Chain complexity in the semiconductor industry: Assessment from system view and the impact of changes. IFAC PapersOnline, 48(3), 1210–1215.

    Article  Google Scholar 

  • Uzsoy, R. (1995, October 01). Scheduling batch processing machines with incompatible job families. International Journal of Production Research, 33(10), 2685–2708.

    Article  Google Scholar 

  • Vimala Rani, M., & Mathirajan, M. (2015, December 01). Dynamic scheduling of diffusion furnace in semiconductor manufacturing with real time events. IEEE International Conference on Industrial Engineering and Engineering Management. https://doi.org/10.1109/IEEM.2015.7385617.

  • Vimala Rani, M., & Mathirajan, M. (September 02, 2016a). Performance evaluation of ATC based greedy heuristic algorithms in scheduling diffusion furnace in wafer fabrication. Journal of Information and Optimization Sciences, 37(5), 717–762.

    Article  Google Scholar 

  • Vimala Rani, M., & Mathirajan, M. (2016b, May 05). Dynamic scheduling of diffusion furnace in semiconductor manufacturing with resource related real time events. In Analytics in operations/supply chain management (pp. 381–396). New Delhi: I.K International Publishing House.

    Google Scholar 

  • Vimala Rani, M., & Mathirajan, M. (2016c, January 01). Multi objective dynamic real-time scheduling of batch processing machine. International Journal of Operations and Quantitative Management, 22(1), 53–73.

    Google Scholar 

  • Vimala Rani, M., & Mathirajan, M. (2020a, June 01). Performance evaluation of due-date based dispatching rules in dynamic scheduling of diffusion furnace. OPSEARCH, 57(2), 462–512.

    Article  Google Scholar 

  • Vimala Rani, M., & Mathirajan, M. (2020b, January 01). Meta-heuristics for dynamic real time scheduling of diffusion furnace in semiconductor manufacturing industry. International Journal of Industrial and Systems Engineering, 34(3), 365–395.

    Article  Google Scholar 

  • Wang, R., & Fei, S. (2014, January 01). Rescheduling: External environment-related real-time events. IFAC Proceedings Volumes, 47(3), 10743–10747.

    Article  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Vinod Gupta School of Management, Indian Institute of Technology, Kharagpur, Kharagpur, India

    M. Vimala Rani

  2. Department of Management Studies, Indian Institute of Science, Bangalore, India

    M. Mathirajan

Authors
  1. M. Vimala Rani
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. M. Mathirajan
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to M. Vimala Rani .

Editor information

Editors and Affiliations

  1. Department of Industrial and Manufacturing Systems Engineering, College of Engineering, Department of Marketing, Trulaske College of Business, University of Missouri, Columbia, MO, USA

    Sharan Srinivas

  2. Department of Marketing, Trulaske College of Business, Department of Industrial and Manufacturing Systems Engineering, College of Engineering, University of Missouri, Columbia, MO, USA

    Suchithra Rajendran

  3. School of Business, Economics and Information Systems, University of Passau, Passau, Germany

    Hans Ziegler

Rights and permissions

Reprints and permissions

Copyright information

© 2021 Springer Nature Switzerland AG

About this chapter

Check for updates. Verify currency and authenticity via CrossMark

Cite this chapter

Vimala Rani, M., Mathirajan, M. (2021). Prescriptive Analytics for Dynamic Real Time Scheduling of Diffusion Furnaces. In: Srinivas, S., Rajendran, S., Ziegler, H. (eds) Supply Chain Management in Manufacturing and Service Systems. International Series in Operations Research & Management Science, vol 304. Springer, Cham. https://doi.org/10.1007/978-3-030-69265-0_9

Download citation

Publish with us

Policies and ethics

Search

Navigation