Multi-Wavelength Vertical Cavity Laser Arrays Grown on a Patterned Backup Substrate

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Guided-Wave Optoelectronics
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Abstract

The capability to fabricate two-dimensional (2D) semiconductor diode laser array is a key and most important step towards making wafer-scale low-cost lasers. The recent emergence of vertical cavity surface emitting laser (VCSEL) facilitates the fabrication such large 2D arrays. In this paper, I will review recent progress on a novel large-aperture single-mode VCSEL and a 2D multiple-wavelength VCSEL array for ultrahigh bandwidth applications. We demonstrated a passive antiguide region (PAR) VCSEL which emits a stable single mode with very low threshold, a large aperture, and fixed polarization. We also demonstrated multi-wavelength VCSEL arrays with repeatable wavelength spans over 20 nm grown by Molecular Beam Epitaxy. The wavelength shift is achieved by varying the GaAs growth rate across the wafer using a patterned backing wafer to induce a temperature profile. Such multiple wavelength laser arrays are promising for ultra-high bandwidth optical transmission and switching systems using wavelength division multiplexing (WDM).

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Chang-Hasnain, C.J., Eng, L.E. (1995). Multi-Wavelength Vertical Cavity Laser Arrays Grown on a Patterned Backup Substrate. In: Tamir, T., Griffel, G., Bertoni, H.L. (eds) Guided-Wave Optoelectronics. Springer, Boston, MA. https://doi.org/10.1007/978-1-4899-1039-4_9

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  • DOI: https://doi.org/10.1007/978-1-4899-1039-4_9

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4899-1041-7

  • Online ISBN: 978-1-4899-1039-4

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