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RF Plasma Deposition of YBa2Cu3O7−x Films

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Superconductivity and Applications

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Abstract

Superconducting YBa2Cu3O7−x films have been grown on single crystal yttria stabilized zirconia by rf plasma deposition from an aqueous solution of the nitrates of Y, Ba and Cu. The as-grown films are highly c-axis oriented perpendicular to the substrate with critical temperature and current density of 85K and ~ 1 × 104 amp/cm2 at 77K, respectively. The influence of the process parameters on the microstructural and transport properties will be discussed.

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Author information

Authors and Affiliations

  1. New York State Institute on Superconductivity, State University of New York at Buffalo, Bonner Hall, Amherst, New York, 14260, USA

    S. Patel, A. Shah & D. T. Shaw

Authors
  1. S. Patel
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  2. A. Shah
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  3. D. T. Shaw
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Editor information

Editors and Affiliations

  1. New York State Institute on Superconductivity, State University of New York at Buffalo, Buffalo, New York, USA

    Hoi S. Kwok , Yi-Han Kao  & David T. Shaw ,  & 

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Patel, S., Shah, A., Shaw, D.T. (1990). RF Plasma Deposition of YBa2Cu3O7−x Films. In: Kwok, H.S., Kao, YH., Shaw, D.T. (eds) Superconductivity and Applications. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-7565-4_8

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  • DOI: https://doi.org/10.1007/978-1-4684-7565-4_8

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-7567-8

  • Online ISBN: 978-1-4684-7565-4

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