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Novel linear piezoelectric motor for precision position stage

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Abstract

Conventional servomotor and step** motor face challenges in nanometer positioning stages due to the complex structure, motion transformation mechanism, and slow dynamic response, especially directly driven by linear motor. A new butterfly-shaped linear piezoelectric motor for linear motion is presented. A two-degree precision position stage driven by the proposed linear ultrasonic motor possesses a simple and compact configuration, which makes the system obtain shorter driving chain. Firstly, the working principle of the linear ultrasonic motor is analyzed. The oscillation orbits of two driving feet on the stator are produced successively by using the anti-symmetric and symmetric vibration modes of the piezoelectric composite structure, and the slider pressed on the driving feet can be propelled twice in only one vibration cycle. Then with the derivation of the dynamic equation of the piezoelectric actuator and transient response model, start-upstart-up and settling state characteristics of the proposed linear actuator is investigated theoretically and experimentally, and is applicable to evaluate step resolution of the precision platform driven by the actuator. Moreover the structure of the two-degree position stage system is described and a special precision displacement measurement system is built. Finally, the characteristics of the two-degree position stage are studied. In the closed-loop condition the positioning accuracy of plus or minus <0.5 μm is experimentally obtained for the stage propelled by the piezoelectric motor. A precision position stage based the proposed butterfly-shaped linear piezoelectric is theoretically and experimentally investigated.

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Authors and Affiliations

  1. State Key Laboratory of Mechanics and Control of Mechanical Structures, Nan**g University of Aeronautics and Astronautics, Nan**g, 210016, China

    Chao Chen, Yunlai Shi, Jun Zhang & Junshan Wang

Authors
  1. Chao Chen
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  2. Yunlai Shi
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  3. Jun Zhang
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  4. Junshan Wang
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Corresponding author

Correspondence to Yunlai Shi.

Additional information

Supported by National Basic Research Program of China(973 Program, Grant No. 2015CB057500), National Natural Science Foundation of China (Grant Nos. 50305035, 51575259), and Research Fund of State Key Laboratory of Mechanics and Control of Mechanical Structures, China(Grant No.0315K01 )

Biographical notes

CHEN Chao, born in 1976, is currently a professor at State Key Laboratory of Mechanics and Control of Mechanical Structures, Nan**g University of Aeronautics and Astronautics, China. He received his PhD degree from Nan**g University of Aeronautics and Astronautics, China, in 2005. His research interests include piezoelectric actuator and ultrasonic motors.

SHI Yunlai, born in 1976, is currently an associate professor at State Key Laboratory of Mechanics and Control of Mechanical Structures, Nan**g University of Aeronautics and Astronautics, China. He received his PhD degree from Nan**g University of Aeronautics and Astronautics, China, in 2008. His research interests include piezoelectric actuator and precision positioning stages.

ZHANG Jun, born in 1983, is currently an PhD candidate at State Key Laboratory of Mechanics and Control of Mechanical Structures, Nan**g University of Aeronautics and Astronautics, China. He received his master degree from Nan**g University of Aeronautics and Astronautics, China, in 2012. His research interests include piezoelectric actuator and precision positioning stages.

WANG Junshan, born in 1982, is currently an PhD candidate at State Key Laboratory of Mechanics and Control of Mechanical Structures, Nan**g University of Aeronautics and Astronautics, China. He received his master degree from Nan**g University of Aeronautics and Astronautics, China, in 2011. His research interests include piezoelectric actuator and ultrasonic motors.

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Chen, C., Shi, Y., Zhang, J. et al. Novel linear piezoelectric motor for precision position stage. Chin. J. Mech. Eng. 29, 378–385 (2016). https://doi.org/10.3901/CJME.2015.1216.149

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  • DOI: https://doi.org/10.3901/CJME.2015.1216.149

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